한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
- /
- Pages.377-378
- /
- 2005
FBAR 소자의 Bragg 반사층의 $SiO_2$ 박막 특성에 관한 연구
Structure characteristics of $SiO_2$ thin film of the FBAR Bragg reflector
- Lee, Soon-Bum (Department of Electric and Electronics Engineering in Kyungwon University) ;
- Park, Sung-Hyun (Department of Electric and Electronics Engineering in Kyungwon University) ;
- Lee, Neung-Heon (Department of Electric and Electronics Engineering in Kyungwon University) ;
- Shin, Young-Hwa (Department of Electric and Electronics Engineering in Kyungwon University)
- 발행 : 2005.07.07
초록
In this study,
키워드