소결조건에 따른 $Pb(Zr_xTi_{1-x})O_3$ 이종층 후막의 유전특성

Dielectric Properties of $Pb(Zr_xTi_{1-x})O_3$ Heterolayered Thick Films with Variation of Sintering Conditions

PZT(20/80) and PZT(80/20) powders, prepared by the sol-gel method, were mixed with an organic vehicle and the PZT(20/80)/PZT(80/20) heterolayered thick films were fabricated by the screen-printing method on Pt/$Al_2O_3$ substrates. The structural properties such as DTA, X-ray diffraction and microstructure, were examined as a amount of the excess PbO. In the DTA analysis, the formation of the polycrystalline perovskite phase was observed at around $880^{\circ}C$. The average thickness of the PZT heterolayered thick films was approximately $80{\mu}m$.