한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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- Pages.240-241
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- 2005
$HfO_2$ 박막 특성에 대한 신경망 모델링
Process Modeling for $HfO_2$ Thin Films using Neural Networks
- 권경은 (연세대학교 전기전자공학과) ;
- 이정환 (연세대학교 전기전자공학과) ;
- 고영돈 (연세대학교 전기전자공학과) ;
- 문태형 (연세대학교 금속공학과) ;
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명재민
(연세대학교 금속공학과) ;
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윤일구
(연세대학교 전기전자공학과)
- Kweon, Kyoung-Eun (Dept. of Electrical and Electronic Engineering, Yonsei Univ.) ;
- Lee, Jung-Hwan (Dept. of Electrical and Electronic Engineering, Yonsei Univ.) ;
- Ko, Young-Don (Dept. of Electrical and Electronic Engineering, Yonsei Univ.) ;
- Moon, Tae-Hyoung (Dept, of Metallugical Engineering, Yonsei Univ.) ;
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Myoung, Jae-Min
(Dept, of Metallugical Engineering, Yonsei Univ.) ;
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Yun, Il-Gu
(Dept. of Electrical and Electronic Engineering, Yonsei Univ.)
- 발행 : 2005.07.07
초록
In this paper, Latin Hypercube Sampling based the neural network model for the electrical characteristics of