Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.07a
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- Pages.207-210
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- 2005
Optimization of the deposition condition on hetero-epitaxial As-doped ZnO thin films by pulsed laser deposition
PLD를 이용한 hetero-epitaxial As-doped ZnO 박막 증착 조건의 최적화
- Lee, Hong-Chan (KIST) ;
- Jung, Youn-Sik (KIST) ;
- Choi, Won-Kook (KIST) ;
- Park, Hun (KIST) ;
- Shim, Kwang-Bo (Hanyang Univ.) ;
- Oh, Young-Jei (KIST)
- 이홍찬 (한국과학기술연구원) ;
- 정연식 (한국과학기술연구원) ;
- 최원국 (한국과학기술연구원) ;
- 박훈 (한국과학기술연구원) ;
- 심광보 (한양대학교) ;
- 오영제 (한국과학기술연구원)
- Published : 2005.07.07
Abstract
In order to investigate the influence of the homo buffer layer on the microstructure of the ZnO thin film, undoped ZnO buffer layer were deposited on sapphire (0001) substrates by ultra high vaccum pulsed laser deposition (UHV-PLD) and molecular beam eiptaxy (MBE). After high temperature annealing at