Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.07a
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- Pages.176-177
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- 2005
A study on Direct Etching of PDMS using Q-switched Nd:YAG Laser
Nd:YAG 레이저를 이용한 PDMS의 직접식각에 대한 연구
- Song, Hyub-Seung (School of Electrical Engineering, Inha University) ;
- Shin, Sung-Kwon (School of Electrical Engineering, Inha University) ;
- Lee, Cheon (School of Electrical Engineering, Inha University)
- Published : 2005.07.07
Abstract
PDMS는 생명공학 분야에서 중요한 기술적 폴리머이다. Nd:YAG레이저의 4고조파 (