Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Bending Mode Multilayer Actuator Using Low Temperature Sintering Piezoelectric Ceramics

저온소결 세라믹을 이용한 밴더형 적층 액츄에이터의 제작

  • 이주영 (한국과학기술연구원, 박막재료 연구센터) ;
  • 김상종 (한국과학기술연구원, 박막재료 연구센터) ;
  • 강종윤 (한국과학기술연구원, 박막재료 연구센터) ;
  • 김현재 (한국과학기술연구원, 박막재료 연구센터) ;
  • 이상렬 (연세대학교, 전기전자공학과) ;
  • 윤석진 (한국과학기술연구원, 박막재료 연구센터)
  • Published : 2005.07.07
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Abstract

Low temperature ($\leq900^{\circ}C$) sintering piezoelectric ceramics $0.01Pb(Mg_{1/2}W_{1/2})O_3$-0.41Pb$(Ni_{1/3}Nb_{2/3})O_3-0.35PbTiO_3-0.23PbZrO_3+0.1wt%Y_2O_3+xwt%ZnO$ $(0{\leq}x{\leq}2.5)$ have been developed and investigated. The electromechanical coupling coefficient ($k_p$), piezoelectric constant ($d_{33}$), and mechanical quality factor ($Q_m$) have been measured to characterize the piezoelectric materials system. When 2.0 wt% ZnO is added, the properties of the system, $d_{33}$ = 559 pC/N, $k_p$ = 55.0 % and $Q_m$ = 73.4 are obtained which are very suitable for piezoelectric actuators. A bending mode multilayer actuator has been also developed using the materials which size is $27(L)\times9(W)\times1.07(t)mm^3$. The actuators are fabricated by multilayer ceramic (MLC) process and consist of24 layers and each layer thickness is $35{\mu}m$. At this time, the displacement of actuator was $100{\mu}m$ at 28V.

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