Dynamic Properties of Tiny Piezoelectric linear Motor by Applied Voltage

인가 전압에 따른 초소형 압전 리니어 모터의 동특성

Recently, a tiny piezoelectric linear motor using a vibration made of the transducer has been invented. The motor consists of a shaft, mobile element, and piezoelectric transducer using a piezoelectric radial mode bimorph disk. The fringe of the bimorph disk is fixed firmly which means this area has no degree of freedom. Therefore, the radial mode of the tranducer transfers to the flexurd mode. The mobile elements move along the shaft by the impact force generated by the flexurd mode of the piezoelectric transducer. The piezoelectric ceramic disks have thickness of 0.1 mm and diameter of 3.5 mm. The elastic disk is introduced between two disks of the ceramic, which has thickness of 0.1 mm and diameter of 3.8 mm. The fringe of the elastic disk is fixed by a brass cylinder which height is 1.2 mm. The Pyrex shaft is used which has diameter of 1 mm and height of 10 mm. The motors are operated at their resonant frequencies. The dynamic properties of the motor have been intensively measured and analyzed according to the applied voltage wave forms at the resonant frequencies. As the sawtooth and rectangular voltage waves are applied, the velocity, the thrust force, and the velocity dependence of the mobile position are measured. The dynamic characteristics are also analyzed within a period of each wave using laser vibrometer. The velocity of the mobile is moderately constant along the shaft. The better dynamic characteristics are obtained in the case of applying the rectangular wave.