한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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- Pages.21-22
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- 2005
소수운반자 전도 SiGe PD-SOI MOSFET의 전기적 특성에 대한 전산 모사
Simulation on Electrical Properties of SiGe PD-SOI MOSFET for Improved Minority Carrier Conduction
- Yang, Hyun-Deok (Chonbuk National University) ;
- Choi, Sang-Sik (Chonbuk National University) ;
- Han, Tae-Hyun (Tachyonics) ;
- Cho, Deok-Ho (Tachyonics) ;
- Kim, Jae-Yeon (Chonbuk National University) ;
- Shim, Kyu-Hwan (Chonbuk National University)
- 발행 : 2005.07.07
초록
Partially-depleted Silicon on insulator metal-oxide-semiconductor field- effect transistors (PD-SOI MOSFETs) with Silicon-germanium (SiGe) layer is investigated. This structure uses SiGe layer to reduce the kink effect in the floating body region near the bottom channel/buried oxide interface. Among many design parameters influencing the performance of the device, Ge composition is presented most predominant effects, simulation results show that kink effect is reduced with increase the Ge composition. Because the bandgap of SiGe layer is reduced at higher Ge composition, the hole current between body and SiGe layer is enhanced.