한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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- Pages.1564-1567
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- 2005
Characteristics of ZnO Thin Films by Means of ALD for the Application of Transparent TFT
- ParkKo, Sang-Hee (Basic Research Laboratory, Electronics and Telecommunications Research Institute) ;
- Hwang, Chi-Sun (Basic Research Laboratory, Electronics and Telecommunications Research Institute) ;
- Kwack, Ho-Sang (Basic Research Laboratory, Electronics and Telecommunications Research Institute) ;
- Kang, Seung-Youl (Basic Research Laboratory, Electronics and Telecommunications Research Institute) ;
- Lee, Jin-Hong (Basic Research Laboratory, Electronics and Telecommunications Research Institute) ;
- Chu, Hye-Yong (Basic Research Laboratory, Electronics and Telecommunications Research Institute) ;
- Lee, Yong-Eui (Display Device Center, Device Solution Network, Samsung Electronics Co., Ltd.)
- 발행 : 2005.07.19
초록
Zinc oxide thin films were grown at the t emperature of
키워드