한국정보디스플레이학회:학술대회논문집
- 2005.07a
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- Pages.269-271
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- 2005
Fabrication of Thin Film Transistor on PES substrate using Sequential Lateral Solidification Crystallized Poly-Si Films
- Kim, Yong-Hae (Basic Research Laboratory, ETRI) ;
- Chung, Choong-Heui (Basic Research Laboratory, ETRI) ;
- Yun, Sun-Jin (Basic Research Laboratory, ETRI) ;
- Park, Dong-Jin (Basic Research Laboratory, ETRI) ;
- Kim, Dae-Won (Basic Research Laboratory, ETRI) ;
- Lim, Jung-Wook (Basic Research Laboratory, ETRI) ;
- Song, Yoon-Ho (Basic Research Laboratory, ETRI) ;
- Moon, Jae-Hyun (Basic Research Laboratory, ETRI) ;
- Lee, Jin-Ho (Basic Research Laboratory, ETRI)
- Published : 2005.07.19
Abstract
Using optimized sputtering condition of a-Si and
Keywords