Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 2005.07a
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- Pages.76-77
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- 2005
Profile Measurement of Reference Step with 93 nm Thickness by Using Stabilized Interferometer and FFT Method
안정화된 간섭계와 FFT 방식을 이용한 93 nm 두께 참조 계단 형상 측정
- Zhen, Liu (Dept. of Applied Photonic Eng.) ;
- Kim, Hyeon-Su (Dept. of Photonic Eng., Chosun Univ.) ;
- Park, Jong-Rak (Dept. of Photonic Eng., Chosun Univ.) ;
- Kim, Jin-Tae (Dept. of Photonic Eng., Chosun Univ.)
- Published : 2005.07.14
Abstract
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