Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 2005.07a
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- Pages.50-51
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- 2005
MSM Photodetector Fabricated on AlGaAs/lnGaAs QW-FET Wafers Using 3${\mu}$ m Lithography Process
3 ${\mu}$ m 리소그라피 공정을 이용하여 AlGaAs/InGaAs QW-FET웨이퍼로 제작된 MSM 광검출기
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