한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2005년도 춘계학술대회 논문집
- /
- Pages.1083-1086
- /
- 2005
- /
- 2005-8446(pISSN)
실리콘 웨이퍼 미세 표면결함의 광산란 특성 평가
Light Scattering Characteristics of Defects on Silicon Wafer Surface
- Ha T.H. (KIMM) ;
- Song J.Y. (KIMM) ;
- Miyoshi Takashi (Mechanical Eng. Dept., Osaka Univ.) ;
- Takaya Yasuhiro (Mechanical Eng. Dept., Osaka Univ.)
- 발행 : 2005.06.01
초록
Light scattering measurement system that can evaluate light scattering characteristic from defects on silicon wafer surface has been developed. The system uses