한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2005년도 춘계학술대회 논문집
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- Pages.773-776
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- 2005
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- 2005-8446(pISSN)
유정압테이블의 위치결정오차요인 분석
Analysis of Positioning Error Factors in the Hydrostatic Tables
초록
In this paper, For improving the positioning accuracy of hydrostatic table, relationship between temperature of atmosphere and thermal characteristics of hydrostatic table is analyzed, and influence of thermal characteristics on positioning accuracy is also analyzed experimentally. From the experimental results, it is confirmed that positioning error and repeatability is
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