Proceedings of the Korean Institute of Information and Commucation Sciences Conference (한국정보통신학회:학술대회논문집)
- Volume 9 Issue 2
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- Pages.320-324
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- 2005
A Study of Efficient Thermal Annealing Method for SMR-Type FBAR Devices
- Song, Hae-Il (School of Engineering, Information and Communications University) ;
- Mai, Linh (School of Engineering, Information and Communications University) ;
- Yoon, Gi-Wan (School of Engineering, Information and Communications University)
- Published : 2005.10.28
Abstract
In this paper, the resonance characteristics of SMR-type FBAR devices annealed by three different annealing methods are investigated and compared. The resonance characteristics could be effectively improved by the proposed efficient annealing method which can optimize the annealing conditions. It seems very useful for improving the performance of the SMR-type FBAR devices in a cost-effective way.
Keywords
- Film bulk acoustic resonator (FBAR);
- Solidly mounted resonator (SMR);
- Bragg reflector;
- Thermal annealing;
- Return loss $(S_{11})$;
- Q-factor