한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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- Pages.329-330
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- 2005
스퍼터 증착법으로 제작한 Bi-Sr-Ca-Cu-O 고온 초전도 박막
High-Tc Superconducting Bi-Sr-Ca-Cu-O Thin Films prepared by Sputter Deposition
- Cheon, Min-Woo (Department of Electrical & Electronic Engineering, Dongshin Univ.) ;
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Yang, Sung-Ho
(Department of Electrical & Electronic Engineering, Dongshin Univ.) ;
- Park, No-Bong (Department of Electrical & Electronic Engineering, Dongshin Univ.) ;
- Park, Yong-Pil (Department of Electrical & Electronic Engineering, Dongshin Univ.)
- 발행 : 2005.11.10
초록
Bi-Sr-Ca-Cu-O thin films have been fabricated by sputter deposition method. During the deposition, 10 and 90 wt%-ozone/oxygen mixture gas of typical pressure of