Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.11a
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- Pages.65-66
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- 2005
Etching Characteristics of GST thin film using Inductively Coupled Plasma of $Cl_2$ /Ar gas mixtures
$Cl_2/Ar$ 유도결합 플라즈마를 이용한 GST 박막의 식각 특성
- Kim, Yun-Ho (Korea Univ) ;
- Park, Eun-Jin (Korea Univ) ;
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Park, Hyung-Ho
(Yonsei Univ) ;
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Min, Nam-Ki
(Korea Univ) ;
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Hong, Suk-In
(Korea Univ) ;
- Kown, Kwang-Ho (Korea Univ)
- Published : 2005.11.10
Abstract
Etching characteristics of