대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.151-153
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- 2005
CMP 공정변수에 따른 ITO박막의 전기적.광학적 특성
Electrical and Optical of Properties ITO Thin Film by CMP Process Parameter
- Choi, Gwon-Woo (Chosun University) ;
- Kim, Nam-Hoon (Chosun University) ;
- Seo, Yong-Jin (Daebul University) ;
- Lee, Woo-Sun (Chosun University)
- 발행 : 2005.11.04
초록
Indium tin oxide (ITO) thin film was polished by chemical mechanical polishing (CMP) by the change of process parameters for the improvement of electrical and optical properties of ITO thin film. Light transparent efficiency of ITO thin film was improved after CMP process at the optimized process parameters compared to that before CMP process.
키워드