Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2005.11a
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- Pages.41-43
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- 2005
Inductively Coupled $Ar/Cl_2$ Plasma Analysis with Quadrupole Mass Spectrometer (QMS)
사중극자 질량분석기(QMS)를 이용한 $Ar/Cl_2$ 유도결합 플라즈마 분석
- Kim, Jong-Gyu (Chung Ang Univ. Electrical and Electronical Engineering) ;
- Kim, Gwan-Ha (Chung Ang Univ. Electrical and Electronical Engineering) ;
- Lee, Cheol-In (Ansan College of Tech. Electrical Engineering) ;
- Kim, Chang-Il (Chung Ang Univ. Electrical and Electronical Engineering)
- Published : 2005.11.04
Abstract
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