Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2005.11a
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- Pages.27-29
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- 2005
Fabrication of phosphorus doped ZnO thin film using multi-layer structure
다층 구조를 이용한 Phosphorus 도핑된 ZnO 박막 제작
- Kang, Hong-Seong (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
- Lim, Sung-Hoon (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
- Chang, Hyun-Woo (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
- Kim, Gun-Hee (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
- Kim, Jong-Hoon (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
- Lee, Sang-Yeol (Dept. of Electrical and Electronic Engineering, Yonsei University)
- Published : 2005.11.04
Abstract
ZnO and phosphorus doped ZnO thin films (ZnO:P) are deposited by pulsed laser deposition grown on (001)
Keywords