Re-determination of inelastic collision cross sections for $C_{3}F_{8}$ molecular gas in $C_{3}F_{8}-Ar$ mixture gases

$C_{3}F_{8}-Ar$혼합가스 상에서 $C_{3}F_{8}$분자가스의 비탄성단면적의 재결정

  • 전병훈 (동국대학교 공과대학 전기공학과)
  • Published : 2005.11.04

Abstract

The electron transport coefficients, the electron drift velocity W, the longitudinal diffusion coefficient $ND_L$ in $C_{3}F_{8}-Ar$ mixture gases were measured by Double shutter drift tube and calculated by multi-term approximation of the Boltzmann equation over the wide E/N range from 0.03 to 100 Td. And an inelastic collision cross sections for $C_{3}F_{8}$ molecular gas were redetermined for quantitative characteristic analysis.

Keywords