Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2005.09a
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- Pages.124-128
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- 2005
볼로메터용 바나듐-텅스텐 산화물로 표면 미세가공한 비냉각 적외선 감지기의 특성
Abstract
To produce a highly sensitive uncooled microbolometer, the development of a high-performance thermometric material is essential. In this work, amorphous vanadium-tungsten oxide was developed as a thermometric material at a low temperature of
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