Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2005.09a
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- Pages.97-101
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- 2005
투입 전류에 따른 Al이 첨가된 ZnO 박막의 전기적, 광학적 특성
Abstract
The ZnO:Al thin films were prepared on glass by Facing Target Sputtering (FTS) system. We investigated electrical, optical, and structural properties of AZO thin film with sputter ins current 0.1[A]-0.6[A]. We obtained the lowest resistivity
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