나노위치제어용 선형 모터의 거동 분석

  • 설진수 (한국기술교육대학교 대학원 메카트로닉스공학과) ;
  • 이우영 (한국기술교육대학교 기계정보공학부) ;
  • 임경화 (한국기술교육대학교 메카트로닉스공학부)
  • 발행 : 2005.05.01

초록

The equipments in semi-conductor, display and measurement fields require high precision and resolution positioning technology. High positioning control can be carried out by using linear motors with little vibration, backlash and friction. In this paper, the acceleration patterns of the moving Part are analyzed to obtain the optimum pattern which leads to the less vibration reduction of equipment. In addition, the effect of friction force in guide rail on position control accuracy is investigated to identify possibility of using current bearing system for nano-positioning control.

키워드