Fabrication of CPP-GMR Spin Valve Using EB Assisted CVD Hard Masks

  • Isogami S. (Department of Electronic Engineering, Tohoku University) ;
  • Kang Y.M (Department of Electronic Engineering, Tohoku University, School of materials science and Engineering, Seoul National University) ;
  • Tsunoda M. (Department of Electronic Engineering, Tohoku University) ;
  • Yoo S.I. (School of materials science and Engineering, Seoul National University) ;
  • Takahashi M. (Department of Electronic Engineering, Tohoku University)
  • 발행 : 2005.12.01