정보저장시스템학회:학술대회논문집
- 2005.10a
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- Pages.195-196
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- 2005
Design of X-Y Actuator with High Vibration Resistance lot Probe-based Data Storages
탐침형 정보저장장치용 이차원 구동기의 내진 구조
Abstract
We report the new design of a miniature electromagnetic actuator for probe-based data storage with anti-vibration mechanism. The actuator consists of a media substrate, silicon frame, 2 pairs of magnets, a spacer, and a printed circuit board (PCB). The total area of the device is