정보저장시스템학회:학술대회논문집
- 정보저장시스템학회 2005년도 추계학술대회 논문집
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- Pages.160-161
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- 2005
Shack-Hartmann 파면분석기와 점광원을 이용한 광학부품의 수차 측정
Wavefront Aberration Measurement with Shack-Hartmann Sensor and Point Source
- 발행 : 2005.10.01
초록
Using a Shack-Hartmann sensor, we construct an optical testing system measuring the wavefront error of small optical components. The systematic error of the sensor is compensated with a reference plane-wave system that produces almost perfect plane waves. Several types of lenses are tested using a point source that generates spherical waves emitted from a pinhole. The results of the optical testing obtained with the Shack- Hartman sensor are compared with those measured with Zygo interferometer.