Micromachined overlapped resonators for wide electromagnetic coupling ranges

광대역 전자기 커플링 용 미세 가공 중첩 공진기

In this paper, a compact S type resonator is presented, where the proposed resonator is surface micromachined over transmission lines or other resonators, in order to obtain a wide range of possible electromagnetic couplings. The structure has been applied in two compact, bandstop and bandpass filters with moderate fractional bandwidths (FBW) of 20% and 25% respectively. The bandstop filter presented, was designed by the combination of two design methods in order to obtain the proposed fractional bandwidth, where traditionally, coupled resonator bandstop filters have been used for narrow stopbands. The bandpass filter illustrates the use of the proposed suspended resonator structure to obtain a wide range of electric type coupling coefficients, and external quality factors for the filter. This paper describes the design methodology, concepts and fabrication method proposed for the design of these filters.