광원을 위한 AC구동 유전체장벽 미세공음극 구조와 상한 pd 제한조건

The Dielectric Barrier micro-hollow cathode structure and its upper pD limitation in alternative current driving for flat panel light source

  • 발행 : 2005.05.01

초록

The Dielectric Barrier micro-hollow cathode structure and it's upper pD limitation are investigated for determining of optimum hollow cathode discharge condition. In experiment, discharge is sustained by AC diriving and investigated gas is pure Xe. From Experiment, Optimum pD range is lower than 0.72 torr.cm at pure Xe and Cu cathode.

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