한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)

한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

진공용 초소형 제품조작을 위한 매니퓰레이터 제작

Development of manipulator for handling micro components in vacuum

  • 윤덕원 (한양대학교 대학원 메카트로닉스공학과) ;
  • 최현석 (한양대학교 대학원 정밀기계공학과) ;
  • 한창수 (한양대학교 기계공학과) ;
  • 최헌종 (한국생산기술연구원) ;
  • 홍원표 (한국생산기술연구원) ;
  • 강은구 (한국생산기술연구원)
  • 발행 : 2005.05.01
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초록

Recently PZT is used in ultra precision mechanism field. PZT itself has a small driving range although it has a high resolution. Many methods, such as inchworm, impact driving, inertial sliding method, etc., have been applied for moving range expansion. In this study, a new actuating mechanism for rotational motion with two driving PZT is proposed. The Fixed-Fixed beam support is applied for compensation of the difference in driving force between expansion and contraction of PZT. The behavior and design parameters of the proposed mechanism are analyzed for improving performance.

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