한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)
- 한국공작기계학회 2005년도 춘계학술대회 논문집
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- Pages.15-18
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- 2005
전자현미경 개발
The development of scanning electron microscopy
- 오현주 (서울산업대학교 나노생산기술연구소) ;
-
장동영
(서울산업대학교 산업정보시스템공학과)
;
- 양희남 (서울산업대학교 산업정보시스템공학과) ;
- 김동환 (서울산업대학교 기계설계자동화공학부) ;
- 박만진 (서울대학교 기계항공공학부) ;
- 심치형 (서울대학교 기계항공공학부) ;
- 김충수 (서울대학교 기계항공공학부)
- Oh H. J. ;
-
Chang D. Y.
;
- Yang H. N. ;
- Kim D. H. ;
- Park M, J. ;
- Shim C. H. ;
- Kim C. S.
- 발행 : 2005.05.01
초록
We have designed and fabricated a thermal scanning electron microscopy. It includes an electron source, two condenser lenses, one objective lens, a scanning coil and a stigmator coil for focusing in column and also have a secondary electron detector for constructing the image in chamber with a high vacuum condition and control part for operating the SEM. Especially, in order for us to find out the optical characteristics, our attention and studies have been concentrated on the effects of two condenser lenses and one objective lens for high resolution with SEM. Finally, we developed a high resolution thermal scanning electron microscopy.