Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2004.08a
- /
- Pages.225-225
- /
- 2004
Control of plasma parameters and negative ion density with modified capacitive discharge
- Yu, Sin-Jae (Dept. of Physics, Korea Advanced Institute of Science and Technology (KAIST)) ;
- Chae, Su-Hang (Dept. of Physics, Korea Advanced Institute of Science and Technology (KAIST)) ;
- Jang, Hong-Yeong (Dept. of Physics, Korea Advanced Institute of Science and Technology (KAIST))
- Published : 2004.08.19
Abstract
Keywords