Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2004.08a
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- Pages.219-220
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- 2004
Characteristics of Poly-Si Thin Films Prepared by IBE with a Substrate Bias System
- Chu, Byung-Yoon (Division of Electronics and Information, Chonbuk National University) ;
- Kim, Ho-Jin (Division of Electronics and Information, Chonbuk National University) ;
- Yang, Sung-Chae (Division of Electronics and Information, Chonbuk National University) ;
- Yatsui, Kiyoshi (Extreme Energy-Density Research Institute, Nagaoka University of Technology)
- Published : 2004.08.19
Abstract
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