한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2004년도 제27회 학술발표회 초록집
- /
- Pages.216-216
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- 2004
A 60 kV Plasma Immersed ION Implantation and Deposition Facility Development and Perfomance Test
- Kim, Jee-Hyun (Korea Electrotechnology Research Institute (KERI)) ;
-
Rim, Geun-Hie
(Korea Electrotechnology Research Institute (KERI))
;
-
Kim, Jong-Hyun
(Korea Electrotechnology Research Institute (KERI))
;
- Nikiforov, S.A. (Korea Electrotechnology Research Institute (KERI)) ;
- Shenderey, S. (Korea Electrotechnology Research Institute (KERI))
- 발행 : 2004.08.19