Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2004.08a
- /
- Pages.216-216
- /
- 2004
A 60 kV Plasma Immersed ION Implantation and Deposition Facility Development and Perfomance Test
- Kim, Jee-Hyun (Korea Electrotechnology Research Institute (KERI)) ;
-
Rim, Geun-Hie
(Korea Electrotechnology Research Institute (KERI))
;
-
Kim, Jong-Hyun
(Korea Electrotechnology Research Institute (KERI))
;
- Nikiforov, S.A. (Korea Electrotechnology Research Institute (KERI)) ;
- Shenderey, S. (Korea Electrotechnology Research Institute (KERI))
- Published : 2004.08.19
Abstract
Keywords