한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2004년도 제27회 학술발표회 초록집
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- Pages.169-169
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- 2004
Optical properties of silicon nitride films by plasma-enhanced chemical vapor deposition
- Ko, Chang-Hun (Dept. of Physics, University of Seoul) ;
- Ham, Chl-Young (Dept. of Nano Science and Technology, University of Seoul) ;
- Han, Hee-Soo (Dept. of Nano Science and Technology, University of Seoul) ;
- Lim, Yong-Hyun (Dept. of Nano Science and Technology, University of Seoul) ;
- Jun, Sung-Ho (Dept. of Nano Science and Technology, University of Seoul) ;
- Bae, Chang-Hyun (Dept. of Chemistry, Kyunghee University) ;
- Park, Kyoung-Wan (Dept. of Nano Science and Technology, University of Seoul) ;
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Han, Moon-Sup
(Dept. of Physics, University of Seoul)
- 발행 : 2004.08.19