Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Temperature Effect On Structural Properties Of Boron Oxide Thin Films Deposited By MOCVD Method

  • Moon, O.M. (Department of Chemistry and Institute of Basic Science, SungKyunKwan University) ;
  • Kang, B.C. (Department of Chemistry and Institute of Basic Science, SungKyunKwan University) ;
  • Boo, J.H. (Department of Chemistry and Institute of Basic Science, SungKyunKwan University)
  • Published : 2004.02.11
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