제어로봇시스템학회:학술대회논문집

제어로봇시스템학회 (Institute of Control, Robotics and Systems)
권호 표지

Floated Wafer Motion Modeling of Clean Tube system

  • Shin, Dong-Hun (Department of Mechanical and Information ,The University of Seoul) ;
  • Yun, Chung-Yong (Department of Mechanical and Information ,The University of Seoul) ;
  • Jeong, Kyoo-Sik (Department of Mechanical and Information ,The University of Seoul) ;
  • Choi, Chul-Hwan (Department of Mechanical and Information ,The University of Seoul)
  • 발행 : 2004.08.25
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초록

This paper presents a wafer motion modeling of the transfer unit and the control unit in the clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean airs. The motion in the transfer unit is modeled as a mass-spring-damper system where the recovering force by air jets issued from the perforated plate is modeled as a linear spring. The motion in the control unit is also modeled as another mass-spring-damper system, but in two dimensional systems. Experiments with a clean tube system built for 12-inch wafers show the validity of the presented force and motion models.

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