Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2004.11a
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- Pages.951-955
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- 2004
Micro Valve with Functional Actuator
기능성 액츄에이터를 이용한 마이크로 밸브
- Yun, So-Nam ;
- Ham, Young-Bog ;
- Lee, Kyung-Woo ;
- Kanda, Kunio (Ceramic-Servo Institute)
- Published : 2004.11.03
Abstract
Piezoelectric(PZT) actuator can substitute for solenoid which is used in fluid control field because it has faster response times and no possibility of explosion. Besides, it is available in a high temperature and it has low energy consumption. In this study, pneumatic micro valve, bimorph type PZT actuator using the softner type PZT, carbon plate as a shim and its controller circuit were suggested and investigated. Performance tests and characteristics analysis, such as displacement, force, hysteresis and frequency properties, were carried out. The displacement of the actuator measured at the end point was 63