Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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Tribological Properties of DLC film on Modified Surface by TiC Plasma Immersion Ion Implantation and Deposition

TiC 이온 주입 층에 증착된 DLC 박막의 트라이볼로지적 특성

  • 이진우 (경북대학교 대학원 기계공학과) ;
  • 김종국 (한국기계연구원 표면기술연구부 기능박막그룹) ;
  • 김석삼 (경북대학교 기계공학부)
  • Published : 2004.04.28
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Abstract

Effects of ion implantation and deposition on the tribological properties of DLC film as a function of implanted energies and process times were investigated. TiC ions were implanted and deposited on the Si-wafer substrates followed by DLC coating using ion beam deposition method. In order to study tribological properties such as friction coefficient and behavior of DLC film on the modified surface as a function of implanted energies and process times, we used a ball-on-disc type apparatus in the atmospheric environment. From results of wear test, as the implanted energy was increased, the friction coefficient was more stable below 0.1.

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