Finite Element Analysis with Viscoplastic Formulation in Open-Die RTP Process

개방형 RTP(Rapid Thermal Pressing)공정의 점소성 유한요소해석

Since polymer materials at elevated temperatures are usually rate-sensitive, the analysis of RTP process requires considering the effect of the rate-dependent. The material behavior that exhibits rate-sensitivity is called visco-plastic. A two-dimensional visco-plastic finite element formulation which constitutive equation is based on the formulation proposed by Perzyna is presented. This Paper is purposed to calcuate pressure distribution on PMMA in compression process and to predict the relationship with defects after demolding process. This paper analyzes, both analytically and numerically, the pressure distributions on the surface of PMMA during open-die RTP process. In this research, PMMA is used to be simulated at $110^{\circ}C$ near the transition temperature.