Vibration Analysis of Super-Precision Linear Motors

초정밀 선형 모터의 진동 분석

Development of the linear motors is recently required to control a high-speed and high-resolution in the high-integrated and speed process industry. This paper presents vibration analyses as well as measurement standards of the newly developed linear motors through analyzing the vibration characteristics of the advanced products. Vibration experiments are conducted for identifying vibration level during operation. They are also included in the modal test to analyze dynamic characteristics. Analytic data using Finite Element Method (FEM) are compared with the results of the modal. The FEM and experiments make it possible to understand these characteristics. Further, through computer simulation for the behavior of moving part to be vibration source, the best acceleration pattern of moving part movement can be verified to achieve effective moving part positioning and reduce the vibration due to moving part movement.