Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Effects of heat treatment and substrates on luminescent characteristics of $ZnGa_O_4:Mn$ thin film phosphor

열처리조건과 기판이 $ZnGa_O_4:Mn$ 박막 형광체의 발광특성에 미치는 영향

  • 정승묵 (한국전자통신연구원 유기EL소자팀) ;
  • 김영진 (경기대학교 재료공학과)
  • Published : 2004.05.06
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Abstract

The green emitting phosphor, $ZnGa_2O_4:Mn$ thin film with spinel structure were deposited by rf magnetron sputtering. Thin film phosphors were heat-treated in nitrogen, vacuum and air atmosphere, respectively. The effects of the substrates, heat-treatment conditions and the sputtering parameters were investigated. The growing behavior and luminescent properties of thin films depend on the crystallinity of the substrates. The Ga/Zn atomic ratios and luminescent characteristics were dependent on the annealing conditions.

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