Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.05a
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- Pages.90-93
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- 2004
Investigation of varied suface passivation layers for solar cells
태양전지를 위한 다양한 표면 패시베이션(passivation) 막들의 연구
- Lee, Ji-Youn (Photovoltaics R&D Center, Sungjin Semitech Co.) ;
- Lee, Soo-Hong (Strategic Research Energy Center, Dept. of Electronics Engineering, Sejong University)
- Published : 2004.05.06
Abstract
In this work, we have used different techniques for the surface passivation: conventional thermal oxidation (CTO), rapid thermal oxidation (RTO), and plasma-enhanced chemical vapour deposition (PECVD). The surface passivation qualities of eight different single and combined double layer have been investigated both on the phosphorus non-diffused p-type FZ silicon and on phosphorus diffused emitter of 100