Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.04a
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- Pages.39-42
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- 2004
Comparison between Superconducting Thin Films Fabricated by Using the Sputtering and the Evaporation Method
스퍼터링 법과 증발 법으로 제작한 초전도 박막의 비교
- Cheon, Min-Woo (Department of Electrical & Electronic Eng., Dongshin University) ;
- Park, No-Bong (Department of Electrical & Electronic Eng., Dongshin University) ;
- Yang, Sung-Ho (Department of Electrical & Electronic Eng., Dongshin University) ;
- Park, Yong-Pil (Department of Electrical & Electronic Eng., Dongshin University) ;
- Kim, Hye-Jeong (PRO-TECH Co., Ltd.)
- 천민우 (동신대학교 전기전자공학과) ;
- 박노봉 (동신대학교 전기전자공학과) ;
- 양승호 (동신대학교 전기전자공학과) ;
- 박용필 (동신대학교 전기전자공학과) ;
- 김혜정 ((주) 프로텍 광부품기술연구소)
- Published : 2004.04.30
Abstract
The
Keywords
- Sputtering method;
- Evaporation method;
- $Bi_2Sr_2Ca_nCu_{n+1}O_x(n{\geq}0)$;
- Superconducting thin film