Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.04b
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- Pages.101-104
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- 2004
Preparation the AlN thin films with the Al bottom electrode
Al 하부전극을 이용한 AlN 박막의 제작
- Kim, Geon-Hi (Dept. of Electrical & Information Engineering Kyungwon Uni.) ;
- Keum, Min-Jong (Dept. of Electrical & Information Engineering Kyungwon Uni.) ;
- Kim, Hyun-Woong (Dept. of Electrical & Information Engineering Kyungwon Uni.) ;
- Kim, Kyung-Hwan (Dept. of Electrical & Information Engineering Kyungwon Uni.)
- Published : 2004.04.24
Abstract
In this study AlN/Al thin films were prepared at various conditions, such as
Keywords