한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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- Pages.1007-1010
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- 2004
A new crystallization method using a patterned $CeO_2$ seed layer on the plastic substrate
- Shim, Myung-Suk (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Kim, Do-Young (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Seo, Chang-Ki (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Yi, Jun-Sin (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Park, Young-Soo (Samsung Advanced Institute of Technology)
- 발행 : 2004.08.23
초록
We report crystallization of a-Si using XeCl excimer laser annealing [1] on the plastic substrate. We tried to obtain higher crystallinity as the effect of
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