한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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- Pages.957-961
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- 2004
Laser crystallization of Si film for poly-Si thin film transistor on plastic substrates
- Kwon, Jang-Yeon (Samsung Advanced Institute of Technology (SAIT)) ;
- Cho, Hans-S (Samsung Advanced Institute of Technology (SAIT)) ;
- Kim, Do-Young (Samsung Advanced Institute of Technology (SAIT)) ;
- Park, Kyung-Bae (Samsung Advanced Institute of Technology (SAIT)) ;
- Jung, Ji-Sim (Samsung Advanced Institute of Technology (SAIT)) ;
- Park, Young-Soo (Samsung Advanced Institute of Technology (SAIT)) ;
- Lee, Min-Chul (Seoul National University) ;
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Han, Min-Koo
(Seoul National University) ;
- Noguchi, Takashi (Samsung Advanced Institute of Technology (SAIT), Sungkyunkwan University)
- 발행 : 2004.08.23
초록
In order to realize high performance thin film transistor (TFT) on plastic substrate, Si film was deposited on plastic substrate at 170
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