한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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- Pages.881-884
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- 2004
Pentacene Thin Film Transistors Fabricated by High-aspect Ratio Metal Shadow Mask
- Jin, Sung-Hun (Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering) ;
- Jung, Keum-Dong (Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering) ;
- Shin, Hyung-Chul (Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering) ;
- Park, Byung-Gook (Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering) ;
- Lee, Jong-Duk (Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering) ;
- Yi, Sang-Min (School of Mechanical and Aerospace Engineering, Seoul National University) ;
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Chu, Chong-Nam
(School of Mechanical and Aerospace Engineering, Seoul National University)
- 발행 : 2004.08.23
초록
The robust and large-area applicable metal shadow masks with a high aspect ratio more than 20 are fabricated by a combination of micro-electro-discharge machining (
키워드