한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Process Controllability and Stability in Organic Vapor Phase Deposition

  • Schwambera, M. (AIXTRON AG) ;
  • Gersdorff, M. (AIXTRON AG) ;
  • Reinhold, M. (AIXTRON AG) ;
  • Meyer, N. (AIXTRON AG) ;
  • Strauch, G. (AIXTRON AG) ;
  • Marheineke, B. (AIXTRON AG) ;
  • Heuken, M. (AIXTRON AG) ;
  • Zhou, T.X. (Universal Display Corporation) ;
  • Ngo, T. (Universal Display Corporation) ;
  • Brown, J.J. (Universal Display Corporation) ;
  • Shtein, M. (Princeton University) ;
  • Forrest, S.R. (Princeton University)
  • Published : 2004.08.23
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Abstract

High performance green $Ir(ppy)_3$-based phosphorescent OLEDs (PHOLEDs) have been fabricated by organic vapor phase deposition ($OVPD^{TM}$). In addition to demonstrating both efficiency and operational device lifetime comparable to devices built by vacuum thermal evaporation, we report on the controllability and stability of the $OVPD^{TM}$ process. Specifically, run-to-run and day-to-day deposition rate reproducibility of better than 2 % for three consecutive days is demonstrated.

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